Measuring ultra-trace amounts of moisture at ultra-high speed to bring innovation to manufacturing processes.
The “FalconTrace” trace moisture analyzer is a device that quantitatively measures the water molecules contained in ultra-small quantities of industrial gases and natural gas using a ball SAW sensor.
It has an extremely fast response, is able to monitor changes in the amount of moisture in real time, and can also be used for two-component measurement of moisture quantity with background gas composition analysis. The moisture concentration in the gas can be measured accurately down to the 1 ppb (part per billion) level.
① Interdigital transducer (IDT) generates surface acoustic waves.
② Surface acoustic waves propagate around the equator of the ball and react to slight changes in the sensitive film.
③ The interdigital transducer detects the signal change of the reacted surface acoustic waves.
④ Highly sensitive sensing is realized by integrating minute changes by multiple laps.
Since the response speed is extremely fast and changes in moisture levels can be monitored in seconds, this is useful for stabilizing the yield and quality of products in semiconductor and rechargeable battery manufacturing processes.
It does not need to be reconfigured for each background gas, and can be used for simultaneous detection in cases where there are variations in the constituents, such as in natural gas. Since the sensor material is a quartz crystal ball, it offers the advantages of corrosion resistance and being lightweight and easy to carry around.
Top model in the series that realizes "ultra" trace moisture measurement
Quality control of industrial gases during the production and at the time of shipment, and purity control of gases for semiconductor manufacturing
Medium model that enables real-time measurement in the middle range
Quality control of general manufacturing lines, moisture content monitoring of battery manufacturing process
A small general-purpose model that emphasizes portability while maintaining high-speed responsiveness
Dry box, space moisture distribution, general gas